JPH0129021B2 - - Google Patents

Info

Publication number
JPH0129021B2
JPH0129021B2 JP57110408A JP11040882A JPH0129021B2 JP H0129021 B2 JPH0129021 B2 JP H0129021B2 JP 57110408 A JP57110408 A JP 57110408A JP 11040882 A JP11040882 A JP 11040882A JP H0129021 B2 JPH0129021 B2 JP H0129021B2
Authority
JP
Japan
Prior art keywords
electrode
einzel lens
sample surface
lens
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57110408A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59838A (ja
Inventor
Tadahiro Takigawa
Isao Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57110408A priority Critical patent/JPS59838A/ja
Publication of JPS59838A publication Critical patent/JPS59838A/ja
Publication of JPH0129021B2 publication Critical patent/JPH0129021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57110408A 1982-06-26 1982-06-26 フオ−カスイオンビ−ム装置 Granted JPS59838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57110408A JPS59838A (ja) 1982-06-26 1982-06-26 フオ−カスイオンビ−ム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57110408A JPS59838A (ja) 1982-06-26 1982-06-26 フオ−カスイオンビ−ム装置

Publications (2)

Publication Number Publication Date
JPS59838A JPS59838A (ja) 1984-01-06
JPH0129021B2 true JPH0129021B2 (en]) 1989-06-07

Family

ID=14535021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57110408A Granted JPS59838A (ja) 1982-06-26 1982-06-26 フオ−カスイオンビ−ム装置

Country Status (1)

Country Link
JP (1) JPS59838A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2763529B2 (ja) * 1986-09-02 1998-06-11 松下電器産業株式会社 電子楽器
JP2763530B2 (ja) * 1986-09-03 1998-06-11 松下電器産業株式会社 電子楽器
JPH0740189B2 (ja) * 1986-10-24 1995-05-01 カシオ計算機株式会社 タツチレスポンス装置
JPH0722716Y2 (ja) * 1987-05-15 1995-05-24 カシオ計算機株式会社 タッチレスポンス装置
JP2764961B2 (ja) * 1988-11-18 1998-06-11 ヤマハ株式会社 電子楽器
JP3968338B2 (ja) 2003-10-08 2007-08-29 株式会社東芝 荷電ビーム露光装置
US7880147B2 (en) * 2008-01-24 2011-02-01 Perkinelmer Health Sciences, Inc. Components for reducing background noise in a mass spectrometer

Also Published As

Publication number Publication date
JPS59838A (ja) 1984-01-06

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